A hybrid finite element strategy for the simulation of MEMS structures (Q2952899)
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scientific article; zbMATH DE number 6669771
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|---|---|---|---|
| default for all languages | No label defined |
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| English | A hybrid finite element strategy for the simulation of MEMS structures |
scientific article; zbMATH DE number 6669771 |
Statements
A hybrid finite element strategy for the simulation of MEMS structures (English)
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30 December 2016
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hybrid FEM
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monolithic
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electro-elasticity
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coupled structure-electrostatic
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MEMS
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dynamic pull-in
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transient analysis
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0.7857725620269775
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0.7799667119979858
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0.7571296691894531
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0.7562949657440186
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0.753250777721405
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