Nonlinear analysis of electrostatically actuated diaphragm-type micropumps
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Publication:331291
DOI10.1007/S11071-015-2379-4zbMATH Open1349.76045OpenAlexW2135422431WikidataQ58483173 ScholiaQ58483173MaRDI QIDQ331291FDOQ331291
Authors: Mehrdad Sheikhlou, R. Shabani, Ghader Rezazadeh 
Publication date: 26 October 2016
Published in: Nonlinear Dynamics (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s11071-015-2379-4
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Multiple scale methods for ordinary differential equations (34E13) Incompressible inviscid fluids (76B99)
Cites Work
- Coupled vibration of a cantilever micro-beam submerged in a bounded incompressible fluid domain
- Title not available (Why is that?)
- A study of the nonlinear response of a resonant microbeam to an electric actuation
- Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in
- Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis
- Dynamic pull-in phenomenon in MEMS resonators
Cited In (4)
- Micropumps for drug delivery systems: a new semi-linear elliptic boundary-value problem
- LIQUID-DIAPHRAGM INTERACTION OF MICROPUMP
- Finite element and analytical fluid-structure interaction analysis of the pneumatically actuated diaphragm microvalves
- Surface energy and thermal stress effect on nonlinear vibration of electrostatically actuated circular micro-/nanoplates based on modified couple stress theory
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