Nonlinear analysis of electrostatically actuated diaphragm-type micropumps

DOI10.1007/S11071-015-2379-4MaRDI QIDQ331291zbMATHOpenAlexWikidataFDO

Authors Mehrdad Sheikhlou, R. Shabani, Ghader Rezazadeh

Publication date 26 October 2016

Published in Nonlinear Dynamics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s11071-015-2379-4

zbMATH Keywords

nonlinear analysismicropumpcircular diaphragmelectrostatic actuation

Mathematics Subject Classification ID

Multiple scale methods for ordinary differential equations (34E13) Incompressible inviscid fluids (76B99)

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Cites work

• scientific article; zbMATH DE number 3651791 (Why is no real title available?)
• A study of the nonlinear response of a resonant microbeam to an electric actuation
• Coupled vibration of a cantilever micro-beam submerged in a bounded incompressible fluid domain
• Dynamic pull-in phenomenon in MEMS resonators
• Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in
• Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis

Cited in

(4)

• Finite element and analytical fluid-structure interaction analysis of the pneumatically actuated diaphragm microvalves
• LIQUID-DIAPHRAGM INTERACTION OF MICROPUMP
• Micropumps for drug delivery systems: a new semi-linear elliptic boundary-value problem
• Surface energy and thermal stress effect on nonlinear vibration of electrostatically actuated circular micro-/nanoplates based on modified couple stress theory

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