Nonlinear analysis of electrostatically actuated diaphragm-type micropumps (Q331291)

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scientific article; zbMATH DE number 6643984
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    Nonlinear analysis of electrostatically actuated diaphragm-type micropumps
    scientific article; zbMATH DE number 6643984

      Statements

      Nonlinear analysis of electrostatically actuated diaphragm-type micropumps (English)
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      26 October 2016
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      micropump
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      electrostatic actuation
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      circular diaphragm
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      nonlinear analysis
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