Nonlinear analysis of electrostatically actuated diaphragm-type micropumps (Q331291)
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scientific article; zbMATH DE number 6643984
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| English | Nonlinear analysis of electrostatically actuated diaphragm-type micropumps |
scientific article; zbMATH DE number 6643984 |
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Nonlinear analysis of electrostatically actuated diaphragm-type micropumps (English)
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26 October 2016
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micropump
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electrostatic actuation
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circular diaphragm
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nonlinear analysis
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0.89545053
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0.8777622
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0.8583052
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0.85415244
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0.85304785
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0.85220516
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0.85144657
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0.8504377
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0.8501354
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