A hybrid solution for analyzing nonlinear dynamics of electrostatically-actuated microcantilevers (Q2293887)
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scientific article; zbMATH DE number 7163421
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| English | A hybrid solution for analyzing nonlinear dynamics of electrostatically-actuated microcantilevers |
scientific article; zbMATH DE number 7163421 |
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A hybrid solution for analyzing nonlinear dynamics of electrostatically-actuated microcantilevers (English)
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5 February 2020
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hybrid solution
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micro electromechanical systems
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pull-in voltage
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electrostatically-actuated microbeam
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distributed parameter system
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0.8053370118141174
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0.7972830533981323
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0.7832667231559753
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0.7818042635917664
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