Effects of nonlinearities on the steady-state dynamic behavior of electric actuated microcantilever-based resonators (Q2852402)
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scientific article; zbMATH DE number 6214090
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| English | Effects of nonlinearities on the steady-state dynamic behavior of electric actuated microcantilever-based resonators |
scientific article; zbMATH DE number 6214090 |
Statements
8 October 2013
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MEMS
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microresonator
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acceleration sensors
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parametric resonance
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stability diagram
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nonlinear Mathieu equation
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Effects of nonlinearities on the steady-state dynamic behavior of electric actuated microcantilever-based resonators (English)
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0.8058264851570129
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0.7972829937934875
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0.7912237644195557
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0.7853493094444275
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