Static and dynamic responses of a microcantilever with a T-shaped tip mass to an electrostatic actuation (Q529415)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Static and dynamic responses of a microcantilever with a T-shaped tip mass to an electrostatic actuation |
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Static and dynamic responses of a microcantilever with a T-shaped tip mass to an electrostatic actuation (English)
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18 May 2017
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MEMS
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electrostatic
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static deflection
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natural frequency
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pull-in voltage
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perturbation theory
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T-shaped mass
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primary and subharmonic resonances
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