Nonlinear problems arising in electrostatic actuation in MEMS

DOI10.1016/J.JMAA.2008.11.031MaRDI QIDQ1018692zbMATH OpenOpenAlexFDO

Authors Janpou Nee

Publication date 20 May 2009

Published in Journal of Mathematical Analysis and Applications (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.jmaa.2008.11.031

zbMATH Keywords

\(\omega \)-limit setexistenceMEMSnon-existencestability

Mathematics Subject Classification ID

Electromagnetic effects in solid mechanics (74F15) Electro- and magnetostatics (78A30) Technical applications of optics and electromagnetic theory (78A55)

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Cites work

• Analysis of the Dynamics and Touchdown in a Model of Electrostatic MEMS
• Existence and stability of solutions for semi-linear parabolic systems, and applications to some diffusion reaction equations
• scientific article; zbMATH DE number 1634460 (Why is no real title available?)
• scientific article; zbMATH DE number 3726839 (Why is no real title available?)
• scientific article; zbMATH DE number 1897397 (Why is no real title available?)
• Nonlinear non-local elliptic equation modelling electrostatic actuation
• On the Partial Differential Equations of Electrostatic MEMS Devices: Stationary Case
• Slow rarefied flows. Theory and application to micro-electro-mechanical systems.
• Touchdown and Pull-In Voltage Behavior of a MEMS Device with Varying Dielectric Properties

Cited in

(3)

• Nonlinear analysis of electrostatically actuated diaphragm-type micropumps
• Some singular equations modeling MEMS
• Nonlinear non-local elliptic equation modelling electrostatic actuation

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