Touchdown and Pull-In Voltage Behavior of a MEMS Device with Varying Dielectric Properties

DOI10.1137/040613391zbMath1103.35042OpenAlexW1982314892MaRDI QIDQ5470266

Yujin Guo, Zhenguo Pan, Michael J. Ward

Publication date: 30 May 2006

Published in: SIAM Journal on Applied Mathematics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1137/040613391

zbMATH Keywords

quenching MEMS pull-in voltage saddle-node dielectric permittivity dielectric elastic membrane rigid conducting ground plate

Mathematics Subject Classification ID

Nonlinear parabolic equations (35K55) Initial-boundary value problems for second-order parabolic equations (35K20) Analytic approximation of solutions (perturbation methods, asymptotic methods, series, etc.) of dynamical problems in solid mechanics (74H10) Electromagnetic effects in solid mechanics (74F15) Thin films (74K35) Membranes (74K15)

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