Touchdown and Pull-In Voltage Behavior of a MEMS Device with Varying Dielectric Properties (Q5470266)

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scientific article; zbMATH DE number 5029041
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Touchdown and Pull-In Voltage Behavior of a MEMS Device with Varying Dielectric Properties
scientific article; zbMATH DE number 5029041

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    Touchdown and Pull-In Voltage Behavior of a MEMS Device with Varying Dielectric Properties (English)
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    30 May 2006
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    quenching
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    pull-in voltage
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    saddle-node
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    MEMS
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    dielectric permittivity
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    dielectric elastic membrane
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    rigid conducting ground plate
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