Singular perturbation analysis of a regularized MEMS model

DOI10.1137/18M1197552zbMATH Open1458.34103arXiv1807.02069OpenAlexW2963299322WikidataQ128071758 ScholiaQ128071758MaRDI QIDQ5383205FDOQ5383205

Authors: Annalisa Iuorio, Nikola Popović, Peter Szmolyan 

Publication date: 20 June 2019

Published in: SIAM Journal on Applied Dynamical Systems (Search for Journal in Brave)

Abstract: Micro-Electro Mechanical Systems (MEMS) are defined as very small structures that combine electrical and mechanical components on a common substrate. Here, the electrostatic-elastic case is considered, where an elastic membrane is allowed to deflect above a ground plate under the action of an electric potential, whose strength is proportional to a parameter $lambda$. Such devices are commonly described by a parabolic partial differential equation that contains a singular nonlinear source term. The singularity in that term corresponds to the so-called "touchdown" phenomenon, where the membrane establishes contact with the ground plate. Touchdown is known to imply the non-existence of steady state solutions and blow-up of solutions in finite time. We study a recently proposed extension of that canonical model, where such singularities are avoided due to the introduction of a regularizing term involving a small "regularization" parameter $varepsilon$. Methods from dynamical systems and geometric singular perturbation theory, in particular the desingularization technique known as "blow-up", allow for a precise description of steady-state solutions of the regularized model, as well as for a detailed resolution of the resulting bifurcation diagram. The interplay between the two main model parameters $varepsilon$ and $lambda$ is emphasized; in particular, the focus is on the singular limit as both parameters tend to zero.

Full work available at URL: https://arxiv.org/abs/1807.02069

Recommendations

• Regularized model of post-touchdown configurations in electrostatic MEMS: equilibrium analysis
• On the partial differential equations of electrostatic MEMS devices. III: Refined touchdown behavior
• Regularized model of post-touchdown configurations in electrostatic MEMS: interface dynamics
• On the partial differential equations of electrostatic MEMS devices. II: Dynamic case
• Analysis of the Dynamics and Touchdown in a Model of Electrostatic MEMS

zbMATH Keywords

boundary value problembifurcation diagramgeometric singular perturbation theorytouchdownblow-up methodmicro-electro mechanical systems

Mathematics Subject Classification ID

Singular nonlinear boundary value problems for ordinary differential equations (34B16) Bifurcation theory for ordinary differential equations (34C23) Singular perturbations for ordinary differential equations (34E15) Singular perturbations in context of PDEs (35B25) Singular parabolic equations (35K67) Asymptotic expansions of solutions to ordinary differential equations (34E05)

Cites Work

• Title not available (Why is that?)
• Matched asymptotic expansions. Ideas and techniques
• Geometric singular perturbation theory for ordinary differential equations
• Extending geometric singular perturbation theory to nonhyperbolic points -- fold and canard points in two dimensions
• Title not available (Why is that?)
• Multiple time scale dynamics
• Title not available (Why is that?)
• Title not available (Why is that?)
• Canard cycles and center manifolds
• Touchdown and Pull-In Voltage Behavior of a MEMS Device with Varying Dielectric Properties
• Tracking invariant manifolds with differential forms in singularly perturbed systems
• Introduction to Applied Nonlinear Dynamical Systems and Chaos
• Nonlinear non-local elliptic equation modelling electrostatic actuation
• Tracking Invariant Manifolds up to Exponentially Small Errors
• Mathematical modeling of electrostatic MEMS with tailored dielectric properties
• Title not available (Why is that?)
• A geometric analysis of the Lagerstrom model problem
• Evans function and blow-up methods in critical eigenvalue problems
• Wave speeds for the FKPP equation with enhancements of the reaction function
• The critical wave speed for the Fisher–Kolmogorov–Petrowskii–Piscounov equation with cut-off
• Multiple quenching solutions of a fourth order parabolic PDE with a singular nonlinearity modeling a MEMS capacitor
• Asymptotics of some nonlinear eigenvalue problems modelling a MEMS capacitor. II: Multiple solutions and singular asymptotics
• Rigorous asymptotic expansions for Lagerstrom's model equation -- a geometric approach
• Regularized model of post-touchdown configurations in electrostatic MEMS: interface dynamics
• Note on Logarithmic Switchback Terms in Regular and Singular Perturbation Expansions
• Regularized model of post-touchdown configurations in electrostatic MEMS: bistability analysis
• Regularized model of post-touchdown configurations in electrostatic MEMS: equilibrium analysis

Cited In (18)

• A survey on the blow-up method for fast-slow systems
• Relaxation oscillations and the entry-exit function in multidimensional slow-fast systems
• Global bifurcation curves of a regularized MEMS model
• Asymptotics of some nonlinear eigenvalue problems modelling a MEMS capacitor. II: Multiple solutions and singular asymptotics
• Asymptotics of some nonlinear eigenvalue problems for a MEMS capacitor: Part I: Fold point asymptotics
• On the classification and evolution of bifurcation curves for a quasilinear regularized MEMS model
• Global bifurcation curve for fourth-order MEMS/NEMS models.
• Symmetry analysis of a canonical MEMS model
• Regularized model of post-touchdown configurations in electrostatic MEMS: interface dynamics
• Regularized model of post-touchdown configurations in electrostatic MEMS: equilibrium analysis
• Analysis of microelectromechanical systems (MEMS) devices by the meshless point weighted least-squares method
• Positivity-preserving and unconditionally energy stable numerical schemes for MEMS model
• A general view on double limits in differential equations
• Singular behavior of an electrostatic-elastic membrane system with an external pressure
• A PDE model for unidirectional flows: stationary profiles and asymptotic behaviour
• The influence of autotoxicity on the dynamics of vegetation spots
• Canards in a bottleneck
• Regularized model of post-touchdown configurations in electrostatic MEMS: bistability analysis

Uses Software

• AUTO

This page was built for publication: Singular perturbation analysis of a regularized MEMS model

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q5383205)