Mathematical Modeling of Electrostatic MEMS with Tailored Dielectric Properties
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Publication:2783738
DOI10.1137/S0036139900381079zbMath1007.78005OpenAlexW2089906151MaRDI QIDQ2783738
Publication date: 17 April 2002
Published in: SIAM Journal on Applied Mathematics (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1137/s0036139900381079
Elliptic equations and elliptic systems (35J99) Electro- and magnetostatics (78A30) Variational methods applied to problems in optics and electromagnetic theory (78M30)
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