A parabolic free boundary problem modeling electrostatic MEMS

DOI10.1007/S00205-013-0656-2zbMATH Open1287.35106arXiv1211.5973OpenAlexW2072556911MaRDI QIDQ2436331FDOQ2436331

Christoph Walker, Joachim Escher, Philippe Laurençot

Publication date: 24 February 2014

Published in: Archive for Rational Mechanics and Analysis (Search for Journal in Brave)

Abstract: The evolution problem for a membrane based model of an electrostatically actuated microelectromechanical system (MEMS) is studied. The model describes the dynamics of the membrane displacement and the electric potential. The latter is a harmonic function in an angular domain, the deformable membrane being a part of the boundary. The former solves a heat equation with a right hand side that depends on the square of the trace of the gradient of the electric potential on the membrane. The resulting free boundary problem is shown to be well-posed locally in time. Furthermore, solutions corresponding to small voltage values exist globally in time while global existence is shown not to hold for high voltage values. It is also proven that, for small voltage values, there is an asymptotically stable steady-state solution. Finally, the small aspect ratio limit is rigorously justified.

Full work available at URL: https://arxiv.org/abs/1211.5973

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zbMATH Keywords

asymptotic behaviourfree boundary problemsteady stateaspect ratioglobal in time solutionmicroelectromechanical systemlocal well-posedness resultanalytic semigroup framework

Mathematics Subject Classification ID

Nonlinear parabolic equations (35K55) PDEs in connection with optics and electromagnetic theory (35Q60) PDEs in connection with mechanics of deformable solids (35Q74) Free boundary problems for PDEs (35R35) Electromagnetic effects in solid mechanics (74F15) Control, switches and devices (``smart materials) in solid mechanics (74M05) Membranes (74K15)

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Cited In (34)

• Mathematical modelling and analysis of temperature effects in MEMS
• Well-posedness of a quasilinear evolution problem modelling MEMS with general permittivity
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