On the Partial Differential Equations of Electrostatic MEMS Devices: Stationary Case

DOI10.1137/050647803zbMATH Open1174.35040arXivmath/0509534OpenAlexW2024105000MaRDI QIDQ3593046FDOQ3593046

Authors: Nassif Ghoussoub, Yujin Guo 

Publication date: 24 September 2007

Published in: SIAM Journal on Mathematical Analysis (Search for Journal in Brave)

Abstract: We analyze the nonlinear elliptic problem $Deltau=fraclambdaf(x)(1+u{)}^2$ on a bounded domain $Omega$ of $R^N$ with Dirichlet boundary conditions. This equation models a simple electrostatic Micro-Electromechanical System (MEMS) device consisting of a thin dielectric elastic membrane with boundary supported at 0 above a rigid ground plate located at -1. When a voltage --represented here by $lambda$-- is applied, the membrane deflects towards the ground plate and a snap-through may occur when it exceeds a certain critical value $lambd{a}^{*}$ (pull-in voltage). This creates a so-called "pull-in instability" which greatly affects the design of many devices. The mathematical model lends to a nonlinear parabolic problem for the dynamic deflection of the elastic membrane which will be considered in forthcoming papers cite{GG2} and cite{GG3}. For now, we focus on the stationary equation where the challenge is to estimate $lambd{a}^{*}$ in terms of material properties of the membrane, which can be fabricated with a spatially varying dielectric permittivity profile $f$. Applying analytical and numerical techniques, the existence of $lambd{a}^{*}$ is established together with rigorous bounds. We show the existence of at least one steady-state when $lambda<lambd{a}^{\ast }$ (and when $lambda=lambd{a}^{\ast }$ in dimension $N<8$) while none is possible for $lambda>lambd{a}^{\ast }$. More refined properties of steady states --such as regularity, stability, uniqueness, multiplicity, energy estimates and comparison results-- are shown to depend on the dimension of the ambient space and on the permittivity profile.

Full work available at URL: https://arxiv.org/abs/math/0509534

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zbMATH Keywords

MEMSpull-in voltageminimal solutionspower law permittivity profile

Mathematics Subject Classification ID

Nonlinear elliptic equations (35J60) Boundary value problems for second-order elliptic equations (35J25) Electromagnetic effects in solid mechanics (74F15)

Cited In (only showing first 100 items - show all)

• Global solution curves for self-similar equations
• Complete quenching phenomenon for a parabolic \(p\)-Laplacian equation with a weighted absorption
• Collection of problems proposed at International Conference on Variational Methods
• On the critical dimension of a fourth order elliptic problem with negative exponent
• On qualitative properties of solutions to microelectromechanical systems with general permittivity
• Properties of positive solutions to an elliptic equation with negative exponent
• Variational approach to MEMS model with fringing field
• An electrostatic-elastic membrane system with an external pressure
• Touchdown and Pull-In Voltage Behavior of a MEMS Device with Varying Dielectric Properties
• The existence and dynamic properties of a parabolic nonlocal MEMS equation
• On solutions of second and fourth order elliptic equations with power-type nonlinearities
• Asymptotics of some nonlinear eigenvalue problems modelling a MEMS capacitor. II: Multiple solutions and singular asymptotics
• Asymptotic analysis of localized solutions to some linear and nonlinear biharmonic eigenvalue problems
• Linearly elastic annular and circular membranes under radial, transverse, and torsional loading. I: Large unwrinkled axisymmetric deformations
• Nonlocal problems in MEMS device control
• Asymptotics of some nonlinear eigenvalue problems for a MEMS capacitor: Part I: Fold point asymptotics
• A hyperbolic non-local problem modelling MEMS technology
• Quasilinear elliptic equations with singular nonlinearity
• On the partial differential equations of electrostatic MEMS devices. II: Dynamic case
• Global solutions of singular parabolic equations arising from electrostatic MEMS
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• The two dimensional \(L_p\) Minkowski problem and nonlinear equations with negative exponents
• A note on model reduction for microelectromechanical systems
• Dynamical Solutions of Singular Wave Equations Modeling Electrostatic MEMS
• On a class of semilinear elliptic problems with singular nonlinearities
• On the partial differential equations of electrostatic MEMS devices. III: Refined touchdown behavior
• Regularity of extremal solutions of semilinaer fourth-order elliptic problems with general nonlinearities
• Properties of positive solutions to nonlocal problems with negative exponents in unbounded domains
• Point ruptures for a MEMS equation with fringing field
• Reconstructing the membrane detection of a 1D electrostatic-driven MEMS device by the shooting method: convergence analysis and ghost solutions identification
• Mathematical analysis of partial differential equations modeling electrostatic MEMS
• Degenerate elliptic equations with singular nonlinearities
• Regularity of radial minimizers of reaction equations involving the \(p\)-Laplacian
• On the Cauchy problem for a reaction-diffusion equation with a singular nonlinearity
• On the semilinear elliptic equations of electrostatic NEMS devices
• Positive solutions of an elliptic equation with negative exponent: stability and critical power
• On the partial differential equations of electrostatic MEMS devices with effects of Casimir force
• Estimates for the quenching time of a MEMS equation with fringing field
• Non-linear effects on canonical MEMS models
• Existence and regularity of extremal solutions for a mean-curvature equation
• Regularized model of post-touchdown configurations in electrostatic MEMS: equilibrium analysis
• A parabolic free boundary problem modeling electrostatic MEMS
• On some touchdown behaviors of the generalized MEMS device equation
• Self-similar solutions for a quenching problem with spatially dependent nonlinearity
• On the quenching behavior of the MEMS with fringing field
• A constrained model for MEMS with varying dielectric properties
• The critical dimension for a fourth-order elliptic problem with singular nonlinearity
• On an eigenvalue problem with a reciprocal-linear term
• On the quenching behaviour of a semilinear wave equation modelling MEMS technology
• Dynamical solutions of singular parabolic equations modeling electrostatic MEMS
• Boundary value problems for a semilinear elliptic equation with singular nonlinearity
• Uniqueness of solutions for elliptic systems and fourth order equations involving a parameter
• Finite Morse index steady states of van der Waals force driven thin film equations
• Some results for a class of quasilinear elliptic equations with singular nonlinearity
• Regularity of the extremal solution for some elliptic problems with singular nonlinearity and advection
• On a general family of nonautonomous elliptic and parabolic equations
• The explosion problem in a flow
• Estimates for the quenching time of a parabolic equation modeling electrostatic MEMS
• Nonlinear problems arising in electrostatic actuation in MEMS
• On the structure of positive solutions to an elliptic problem with a singular nonlinearity
• On MEMS equation with fringing field
• Viscosity dominated limit of global solutions to a hyperbolic equation in MEMS
• Analysis of the Dynamics and Touchdown in a Model of Electrostatic MEMS
• Sub-harmonicity, monotonicity formula and finite Morse index solutions of an elliptic equation with negative exponent
• On the dynamic pull-in instability in a mass-spring model of electrostatically actuated MEMS devices
• Exact multiplicity and numerical computation of solutions for two classes of non-autonomous problems with concave-convex nonlinearities
• Multimode analysis of the dynamics and integrity of electrically actuated MEMS resonators
• Supercritical elliptic problems on a perturbation of the ball
• Regularity of semi-stable solutions to fourth order nonlinear eigenvalue problems on general domains
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• COMPACTNESS OF A NONLINEAR EIGENVALUE PROBLEM WITH A SINGULAR NONLINEARITY
• Structure of positive radial solutions of a quasilinear elliptic problem with singular nonlinearity
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• Some elliptic problems with singular nonlinearity and advection for Riemannian manifolds
• Existence and uniqueness for a coupled parabolic-hyperbolic model of MEMS
• Bifurcation diagram of a Robin boundary value problem arising in MEMS
• On semi‐linear elliptic equation arising from Micro‐Electromechanical Systems with contacting elastic membrane
• The Gelfand problem on annular domains of double revolution with monotonicity
• Finite difference scheme for 2D parabolic problem modelling electrostatic micro-electromechanical systems
• Regularity of extremal solutions of nonlocal elliptic systems
• Estimates on pull-in distances in microelectromechanical systems models and other nonlinear eigenvalue problems
• Multiplicity and symmetry breaking for positive radial solutions of semilinear elliptic equations modelling MEMS on annular domains
• The abstract quasilinear Cauchy problem for a MEMS model with two free boundaries
• A perturbed fourth order elliptic equation with negative exponent
• Mathematical analyses of electrostatic MEMS switches
• Free vibrations in a wave equation modeling MEMS
• On semilinear elliptic equation with negative exponent arising from a closed MEMS model
• Symmetry analysis of a canonical MEMS model
• Moving planes for nonlinear fractional Laplacian equation with negative powers
• Regularity and uniqueness results for second-order nonlinear eigenvalue problems
• Quantitative touchdown localization for the MEMS problem with variable dielectric permittivity
• Positivity-preserving and unconditionally energy stable numerical schemes for MEMS model
• Singular behavior of an electrostatic-elastic membrane system with an external pressure
• Supersolutions to nonautonomous Choquard equations in general domains
• Study on the behaviors of rupture solutions for a class of elliptic MEMS equations in \(\mathbb{R}^2\)
• Quenching phenomenon for a parabolic MEMS equation
• Quenching for a parabolic equation with variable coefficient modeling MEMS technology
• On an elliptic-parabolic MEMS model with two free boundaries

Uses Software

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