On the Partial Differential Equations of Electrostatic MEMS Devices: Stationary Case

DOI10.1137/050647803MaRDI QIDQ3593046zbMATH OpenOpenAlexFDO

Authors Nassif Ghoussoub, Yujin Guo

Publication date 24 September 2007

Published in SIAM Journal on Mathematical Analysis (Search for Journal in Brave)

Full work available at URL https://arxiv.org/abs/math/0509534

zbMATH Keywords

MEMSpull-in voltageminimal solutionspower law permittivity profile

Mathematics Subject Classification ID

Nonlinear elliptic equations (35J60) Boundary value problems for second-order elliptic equations (35J25) Electromagnetic effects in solid mechanics (74F15)

Abstract: We analyze the nonlinear elliptic problem $Deltau=fraclambdaf(x)(1+u{)}^2$ on a bounded domain $Omega$ of $R^N$ with Dirichlet boundary conditions. This equation models a simple electrostatic Micro-Electromechanical System (MEMS) device consisting of a thin dielectric elastic membrane with boundary supported at 0 above a rigid ground plate located at -1. When a voltage --represented here by $lambda$-- is applied, the membrane deflects towards the ground plate and a snap-through may occur when it exceeds a certain critical value $lambd{a}^{\ast }$ (pull-in voltage). This creates a so-called "pull-in instability" which greatly affects the design of many devices. The mathematical model lends to a nonlinear parabolic problem for the dynamic deflection of the elastic membrane which will be considered in forthcoming papers cite{GG2} and cite{GG3}. For now, we focus on the stationary equation where the challenge is to estimate $lambd{a}^{\ast }$ in terms of material properties of the membrane, which can be fabricated with a spatially varying dielectric permittivity profile $f$. Applying analytical and numerical techniques, the existence of $lambd{a}^{\ast }$ is established together with rigorous bounds. We show the existence of at least one steady-state when $lambda<lambd{a}^{\ast }$ (and when $lambda=lambd{a}^{\ast }$ in dimension $N<8$) while none is possible for $lambda>lambd{a}^{\ast }$. More refined properties of steady states --such as regularity, stability, uniqueness, multiplicity, energy estimates and comparison results-- are shown to depend on the dimension of the ambient space and on the permittivity profile.

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Cited in

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• Regularity of semi-stable solutions to fourth order nonlinear eigenvalue problems on general domains
• Variational solutions to an evolution model for MEMS with heterogeneous dielectric properties
• COMPACTNESS OF A NONLINEAR EIGENVALUE PROBLEM WITH A SINGULAR NONLINEARITY
• A new model for electrostatic MEMS with two free boundaries
• Sharp estimates of radial minimizers of 𝑝–Laplace equations
• Structure of positive radial solutions of a quasilinear elliptic problem with singular nonlinearity
• Some singular equations modeling MEMS
• On Lane-Emden systems with singular nonlinearities and applications to MEMS
• Some elliptic problems with singular nonlinearity and advection for Riemannian manifolds
• The structure of stationary solutions to a micro-electro mechanical system with fringing field
• Explicit solutions and multiplicity results for some equations with the \(p\)-Laplacian
• Complete quenching phenomenon for a parabolic p-Laplacian equation with a weighted absorption
• Global solution curves for self-similar equations
• Collection of problems proposed at International Conference on Variational Methods
• On the critical dimension of a fourth order elliptic problem with negative exponent
• On qualitative properties of solutions to microelectromechanical systems with general permittivity
• Bifurcation diagram of a Robin boundary value problem arising in MEMS
• Variational approach to MEMS model with fringing field
• Properties of positive solutions to an elliptic equation with negative exponent
• Existence and uniqueness for a coupled parabolic-hyperbolic model of MEMS
• An electrostatic-elastic membrane system with an external pressure
• The existence and dynamic properties of a parabolic nonlocal MEMS equation
• On semi‐linear elliptic equation arising from Micro‐Electromechanical Systems with contacting elastic membrane
• Touchdown and Pull-In Voltage Behavior of a MEMS Device with Varying Dielectric Properties
• On solutions of second and fourth order elliptic equations with power-type nonlinearities
• Linearly elastic annular and circular membranes under radial, transverse, and torsional loading. I: Large unwrinkled axisymmetric deformations
• Asymptotics of some nonlinear eigenvalue problems for a MEMS capacitor: Part I: Fold point asymptotics
• A hyperbolic non-local problem modelling MEMS technology
• Quasilinear elliptic equations with singular nonlinearity
• Asymptotic analysis of localized solutions to some linear and nonlinear biharmonic eigenvalue problems
• Asymptotics of some nonlinear eigenvalue problems modelling a MEMS capacitor. II: Multiple solutions and singular asymptotics
• On the partial differential equations of electrostatic MEMS devices. II: Dynamic case
• Nonlocal problems in MEMS device control
• Global solutions of singular parabolic equations arising from electrostatic MEMS
• Uniqueness of solutions for an elliptic equation modeling MEMS
• Finite difference scheme for 2D parabolic problem modelling electrostatic micro-electromechanical systems
• Regularity of extremal solutions of nonlocal elliptic systems
• The two dimensional L_p Minkowski problem and nonlinear equations with negative exponents
• The Gelfand problem on annular domains of double revolution with monotonicity
• A note on model reduction for microelectromechanical systems
• Dynamical Solutions of Singular Wave Equations Modeling Electrostatic MEMS
• On a class of semilinear elliptic problems with singular nonlinearities
• On the partial differential equations of electrostatic MEMS devices. III: Refined touchdown behavior
• Estimates on pull-in distances in microelectromechanical systems models and other nonlinear eigenvalue problems
• Regularity of extremal solutions of semilinaer fourth-order elliptic problems with general nonlinearities
• Properties of positive solutions to nonlocal problems with negative exponents in unbounded domains
• Reconstructing the membrane detection of a 1D electrostatic-driven MEMS device by the shooting method: convergence analysis and ghost solutions identification
• Point ruptures for a MEMS equation with fringing field
• The abstract quasilinear Cauchy problem for a MEMS model with two free boundaries
• Multiplicity and symmetry breaking for positive radial solutions of semilinear elliptic equations modelling MEMS on annular domains
• A perturbed fourth order elliptic equation with negative exponent
• Degenerate elliptic equations with singular nonlinearities
• Mathematical analysis of partial differential equations modeling electrostatic MEMS
• Regularity of radial minimizers of reaction equations involving the p-Laplacian
• Mathematical analyses of electrostatic MEMS switches
• On the Cauchy problem for a reaction-diffusion equation with a singular nonlinearity
• On the semilinear elliptic equations of electrostatic NEMS devices
• Positive solutions of an elliptic equation with negative exponent: stability and critical power
• On the partial differential equations of electrostatic MEMS devices with effects of Casimir force
• Free vibrations in a wave equation modeling MEMS
• Estimates for the quenching time of a MEMS equation with fringing field
• On semilinear elliptic equation with negative exponent arising from a closed MEMS model
• Existence and regularity of extremal solutions for a mean-curvature equation
• Symmetry analysis of a canonical MEMS model
• Non-linear effects on canonical MEMS models
• Moving planes for nonlinear fractional Laplacian equation with negative powers
• Regularized model of post-touchdown configurations in electrostatic MEMS: equilibrium analysis
• A parabolic free boundary problem modeling electrostatic MEMS
• On some touchdown behaviors of the generalized MEMS device equation
• Self-similar solutions for a quenching problem with spatially dependent nonlinearity
• A constrained model for MEMS with varying dielectric properties
• The critical dimension for a fourth-order elliptic problem with singular nonlinearity
• Regularity and uniqueness results for second-order nonlinear eigenvalue problems
• On the quenching behaviour of a semilinear wave equation modelling MEMS technology
• On the quenching behavior of the MEMS with fringing field
• Dynamical solutions of singular parabolic equations modeling electrostatic MEMS
• Quantitative touchdown localization for the MEMS problem with variable dielectric permittivity
• Positivity-preserving and unconditionally energy stable numerical schemes for MEMS model
• Boundary value problems for a semilinear elliptic equation with singular nonlinearity
• Uniqueness of solutions for elliptic systems and fourth order equations involving a parameter
• Singular behavior of an electrostatic-elastic membrane system with an external pressure
• On an eigenvalue problem with a reciprocal-linear term
• Finite Morse index steady states of van der Waals force driven thin film equations
• Quenching phenomenon for a parabolic MEMS equation
• Some results for a class of quasilinear elliptic equations with singular nonlinearity
• Quenching for a parabolic equation with variable coefficient modeling MEMS technology
• Supersolutions to nonautonomous Choquard equations in general domains
• Study on the behaviors of rupture solutions for a class of elliptic MEMS equations in \(\mathbb{R}^2\)
• On an elliptic-parabolic MEMS model with two free boundaries
• Regularity of the extremal solution for some elliptic problems with singular nonlinearity and advection
• On a free boundary model for three-dimensional MEMS with a hinged top plate: stationary case
• A semilinear problem with a gradient term in the nonlinearity
• On a general family of nonautonomous elliptic and parabolic equations
• The explosion problem in a flow
• Estimates for the quenching time of a parabolic equation modeling electrostatic MEMS
• Nonlinear problems arising in electrostatic actuation in MEMS
• On the structure of positive solutions to an elliptic problem with a singular nonlinearity
• Viscosity dominated limit of global solutions to a hyperbolic equation in MEMS
• On MEMS equation with fringing field
• Quenching rate for a nonlocal problem arising in the micro-electro mechanical system

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