Heterogeneous dielectric properties in models for microelectromechanical systems

DOI10.1137/17M1117483zbMATH Open1391.35371arXiv1707.01323MaRDI QIDQ4603769FDOQ4603769

Christoph Walker, Philippe Laurençot

Publication date: 19 February 2018

Published in: SIAM Journal on Applied Mathematics (Search for Journal in Brave)

Abstract: An idealized electrostatically actuated microelectromechanical system (MEMS) involving an elastic plate with a heterogeneous dielectric material is considered. Starting from the electrostatic and mechanical energies, the governing evolution equations for the electrostatic potential and the plate deflection are derived from the corresponding energy balance. This leads to a free boundary transmission problem due to a jump of the dielectric permittivity across the interface separating elastic plate and free space. Reduced models retaining the influence of the heterogeneity of the elastic plate under suitable assumptions are obtained when either the elastic's plate thickness or the aspect ratio of the device vanishes.

Full work available at URL: https://arxiv.org/abs/1707.01323

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zbMATH Keywords

free boundary problemMEMSvariational inequalitytransmission problemvanishing aspect ratio

Mathematics Subject Classification ID

Unilateral problems for nonlinear elliptic equations and variational inequalities with nonlinear elliptic operators (35J87) Initial-boundary value problems for mixed-type systems of PDEs (35M33) PDEs in connection with mechanics of deformable solids (35Q74) Free boundary problems for PDEs (35R35) Electromagnetic effects in solid mechanics (74F15) Plates (74K20)

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Cited In (8)

• Energy minimizers for an asymptotic MEMS model with heterogeneous dielectric properties
• Shape derivative of the Dirichlet energy for a transmission problem
• Title not available (Why is that?)
• Touchdown is the only finite time singularity in a three-dimensional MEMS model
• On a free boundary model for three-dimensional MEMS with a hinged top plate: stationary case
• Convergence of energy minimizers of a MEMS model in the reinforced limit
• \(H^2\)-regularity for a two-dimensional transmission problem with geometric constraint
• Stationary states to a free boundary transmission problem for an electrostatically actuated plate

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