Heterogeneous dielectric properties in models for microelectromechanical systems
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Publication:4603769
Unilateral problems for nonlinear elliptic equations and variational inequalities with nonlinear elliptic operators (35J87) Initial-boundary value problems for mixed-type systems of PDEs (35M33) PDEs in connection with mechanics of deformable solids (35Q74) Free boundary problems for PDEs (35R35) Electromagnetic effects in solid mechanics (74F15) Plates (74K20)
Abstract: An idealized electrostatically actuated microelectromechanical system (MEMS) involving an elastic plate with a heterogeneous dielectric material is considered. Starting from the electrostatic and mechanical energies, the governing evolution equations for the electrostatic potential and the plate deflection are derived from the corresponding energy balance. This leads to a free boundary transmission problem due to a jump of the dielectric permittivity across the interface separating elastic plate and free space. Reduced models retaining the influence of the heterogeneity of the elastic plate under suitable assumptions are obtained when either the elastic's plate thickness or the aspect ratio of the device vanishes.
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Cited in
(10)- On a free boundary model for three-dimensional MEMS with a hinged top plate: stationary case
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