A free boundary problem modeling electrostatic MEMS: I. Linear bending effects

DOI10.1007/S00208-014-1032-8MaRDI QIDQ464144zbMATH OpenOpenAlexFDO

Authors Philippe Laurençot, Christoph Walker

Publication date 17 October 2014

Published in Mathematische Annalen (Search for Journal in Brave)

Full work available at URL https://arxiv.org/abs/1308.6235

zbMATH Keywords

free boundary problemexistence and not existence of steady statelocal and global existence and uniquenesssystem of the equations of mixed type

Mathematics Subject Classification ID

Continuation and prolongation of solutions to PDEs (35B60) Initial-boundary value problems for mixed-type systems of PDEs (35M33) PDEs in connection with mechanics of deformable solids (35Q74) Free boundary problems for PDEs (35R35) Nonlinear higher-order PDEs (35G20) Second-order elliptic equations (35J15)

Abstract: The dynamical and stationary behaviors of a fourth-order evolution equation with clamped boundary conditions and a singular nonlocal reaction term, which is coupled to an elliptic free boundary problem on a non-smooth domain, are investigated. The equation arises in the modeling of microelectromechanical systems (MEMS) and includes two positive parameters $lambda$ and $varepsilon$ related to the applied voltage and the aspect ratio of the device, respectively. Local and global well-posedness results are obtained for the corresponding hyperbolic and parabolic evolution problems as well as a criterion for global existence excluding the occurrence of finite time singularities which are not physically relevant. Existence of a stable steady state is shown for sufficiently small $lambda$. Non-existence of steady states is also established when $varepsilon$ is small enough and $lambda$ is large enough (depending on $varepsilon$).

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Cited in

(26)

• Mathematical modelling and analysis of temperature effects in MEMS
• On qualitative properties of solutions to microelectromechanical systems with general permittivity
• A variational approach to a stationary free boundary problem modeling MEMS
• Shape derivative of the Dirichlet energy for a transmission problem
• On semi‐linear elliptic equation arising from Micro‐Electromechanical Systems with contacting elastic membrane
• A qualitative analysis of solutions to microelectromechanical systems with curvature and nonlinear permittivity profile
• A note on model reduction for microelectromechanical systems
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• The abstract quasilinear Cauchy problem for a MEMS model with two free boundaries
• A free boundary problem in the theory of electrically actuated microdevices
• Free vibrations in a wave equation modeling MEMS
• Regularized model of post-touchdown configurations in electrostatic MEMS: equilibrium analysis
• A free boundary problem modeling electrostatic MEMS. II: Nonlinear bending effects
• On a free boundary model for three-dimensional MEMS with a hinged top plate. II: Parabolic case
• Heterogeneous dielectric properties in models for microelectromechanical systems
• Dynamics of a free boundary problem with curvature modeling electrostatic MEMS
• Touchdown is the only finite time singularity in a three-dimensional MEMS model
• On a three-dimensional free boundary problem modeling electrostatic MEMS
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• A free boundary value problem modelling microelectromechanical systems with general permittivity
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