A free boundary problem modeling electrostatic MEMS: I. Linear bending effects

DOI10.1007/S00208-014-1032-8zbMATH Open1333.35351arXiv1308.6235OpenAlexW2087081610MaRDI QIDQ464144FDOQ464144

Authors: Philippe Laurençot, Christoph Walker 

Publication date: 17 October 2014

Published in: Mathematische Annalen (Search for Journal in Brave)

Abstract: The dynamical and stationary behaviors of a fourth-order evolution equation with clamped boundary conditions and a singular nonlocal reaction term, which is coupled to an elliptic free boundary problem on a non-smooth domain, are investigated. The equation arises in the modeling of microelectromechanical systems (MEMS) and includes two positive parameters $lambda$ and $varepsilon$ related to the applied voltage and the aspect ratio of the device, respectively. Local and global well-posedness results are obtained for the corresponding hyperbolic and parabolic evolution problems as well as a criterion for global existence excluding the occurrence of finite time singularities which are not physically relevant. Existence of a stable steady state is shown for sufficiently small $lambda$. Non-existence of steady states is also established when $varepsilon$ is small enough and $lambda$ is large enough (depending on $varepsilon$).

Full work available at URL: https://arxiv.org/abs/1308.6235

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zbMATH Keywords

free boundary problemexistence and not existence of steady statelocal and global existence and uniquenesssystem of the equations of mixed type

Mathematics Subject Classification ID

Continuation and prolongation of solutions to PDEs (35B60) Initial-boundary value problems for mixed-type systems of PDEs (35M33) PDEs in connection with mechanics of deformable solids (35Q74) Free boundary problems for PDEs (35R35) Nonlinear higher-order PDEs (35G20) Second-order elliptic equations (35J15)

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Cited In (26)

• Mathematical modelling and analysis of temperature effects in MEMS
• On qualitative properties of solutions to microelectromechanical systems with general permittivity
• A variational approach to a stationary free boundary problem modeling MEMS
• On semi‐linear elliptic equation arising from Micro‐Electromechanical Systems with contacting elastic membrane
• Shape derivative of the Dirichlet energy for a transmission problem
• A qualitative analysis of solutions to microelectromechanical systems with curvature and nonlinear permittivity profile
• A note on model reduction for microelectromechanical systems
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• A free boundary problem modeling electrostatic MEMS. II: Nonlinear bending effects
• The time singular limit for a fourth-order damped wave equation for MEMS
• Qualitative analysis of a curvature equation modelling MEMS with vertical loads
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• Heterogeneous dielectric properties in models for microelectromechanical systems
• Dynamics of a free boundary problem with curvature modeling electrostatic MEMS
• Touchdown is the only finite time singularity in a three-dimensional MEMS model
• On a free boundary model for three-dimensional MEMS with a hinged top plate: stationary case
• On a three-dimensional free boundary problem modeling electrostatic MEMS
• Vanishing aspect ratio limit for a fourth-order MEMS model
• A free boundary value problem modelling microelectromechanical systems with general permittivity
• A new model for electrostatic MEMS with two free boundaries
• Some singular equations modeling MEMS
• A survey on second order free boundary value problems modelling MEMS with general permittivity profile

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