A variational approach to a stationary free boundary problem modeling MEMS

DOI10.1051/COCV/2015012MaRDI QIDQ2808051zbMATH OpenOpenAlexFDO

Authors Philippe Laurençot, Christoph Walker

Publication date 26 May 2016

Published in European Series in Applied and Industrial Mathematics (ESAIM): Control, Optimization and Calculus of Variations (Search for Journal in Brave)

Full work available at URL https://arxiv.org/abs/1409.2812

zbMATH Keywords

free boundaryMEMSmultiplicityconstrained minimizationstationary solutions

Mathematics Subject Classification ID

Variational methods for higher-order elliptic equations (35J35) Free boundary problems for PDEs (35R35)

Abstract: A variational approach is employed to find stationary solutions to a free boundary problem modeling an idealized electrostatically actuated MEMS device made of an elastic plate coated with a thin dielectric film and suspended above a rigid ground plate. The model couples a non-local fourth-order equation for the elastic plate deflection to the harmonic electrostatic potential in the free domain between the elastic and the ground plate. The corresponding energy is non-coercive reflecting an inherent singularity related to a possible touchdown of the elastic plate. Stationary solutions are constructed using a constrained minimization problem. A by-product is the existence of at least two stationary solutions for some values of the applied voltage.

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Cited in

(17)

• Variational approach to MEMS model with fringing field
• Energy minimizers for an asymptotic MEMS model with heterogeneous dielectric properties
• Shape derivative of the Dirichlet energy for a transmission problem
• Qualitative analysis of a curvature equation modelling MEMS with vertical loads
• A stationary free boundary problem modeling electrostatic MEMS
• A free boundary problem in the theory of electrically actuated microdevices
• Erratum to: A variational approach to a stationary free boundary problem modeling MEMS
• On a free boundary model for three-dimensional MEMS with a hinged top plate. II: Parabolic case
• Heterogeneous dielectric properties in models for microelectromechanical systems
• Touchdown is the only finite time singularity in a three-dimensional MEMS model
• On a free boundary model for three-dimensional MEMS with a hinged top plate: stationary case
• Vanishing aspect ratio limit for a fourth-order MEMS model
• Stationary solutions to a nonlocal fourth-order elliptic obstacle problem
• Variational solutions to an evolution model for MEMS with heterogeneous dielectric properties
• Some singular equations modeling MEMS
• Stationary states to a free boundary transmission problem for an electrostatically actuated plate
• A fourth-order model for MEMS with clamped boundary conditions

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