A variational approach to a stationary free boundary problem modeling MEMS
From MaRDI portal
Publication:2808051
DOI10.1051/COCV/2015012zbMATH Open1341.35038arXiv1409.2812OpenAlexW2027601264MaRDI QIDQ2808051FDOQ2808051
Authors: Philippe Laurençot, Christoph Walker 
Publication date: 26 May 2016
Published in: European Series in Applied and Industrial Mathematics (ESAIM): Control, Optimization and Calculus of Variations (Search for Journal in Brave)
Abstract: A variational approach is employed to find stationary solutions to a free boundary problem modeling an idealized electrostatically actuated MEMS device made of an elastic plate coated with a thin dielectric film and suspended above a rigid ground plate. The model couples a non-local fourth-order equation for the elastic plate deflection to the harmonic electrostatic potential in the free domain between the elastic and the ground plate. The corresponding energy is non-coercive reflecting an inherent singularity related to a possible touchdown of the elastic plate. Stationary solutions are constructed using a constrained minimization problem. A by-product is the existence of at least two stationary solutions for some values of the applied voltage.
Full work available at URL: https://arxiv.org/abs/1409.2812
Recommendations
- A stationary free boundary problem modeling electrostatic MEMS
- A free boundary problem in the theory of electrically actuated microdevices
- On a free boundary model for three-dimensional MEMS with a hinged top plate: stationary case
- A new model for electrostatic MEMS with two free boundaries
- On a three-dimensional free boundary problem modeling electrostatic MEMS
Variational methods for higher-order elliptic equations (35J35) Free boundary problems for PDEs (35R35)
Cites Work
- Elliptic partial differential equations of second order
- Variation and optimization of formes. A geometric analysis
- On optimal shape design
- Title not available (Why is that?)
- Mathematical analysis of partial differential equations modeling electrostatic MEMS
- Title not available (Why is that?)
- Applied functional analysis. Main principles and their applications
- A stationary free boundary problem modeling electrostatic MEMS
- A parabolic free boundary problem modeling electrostatic MEMS
- A free boundary problem modeling electrostatic MEMS: II. Nonlinear bending effects
- Finite time singularity in a free boundary problem modeling MEMS
- A free boundary problem modeling electrostatic MEMS: I. Linear bending effects
- Sign-preserving property for some fourth-order elliptic operators in one dimension or in radial symmetry
- A fourth-order model for MEMS with clamped boundary conditions
- Asymptotic first eigenvalue estimates for the biharmonic operator on a rectangle
- Revisiting the biharmonic equation modelling electrostatic actuation in lower dimensions
- Title not available (Why is that?)
- Dynamics of a free boundary problem with curvature modeling electrostatic MEMS
- Multiple quenching solutions of a fourth order parabolic PDE with a singular nonlinearity modeling a MEMS capacitor
- Positivity, change of sign and buckling eigenvalues in a one-dimensional fourth order model problem
Cited In (14)
- Variational approach to MEMS model with fringing field
- Energy minimizers for an asymptotic MEMS model with heterogeneous dielectric properties
- Shape derivative of the Dirichlet energy for a transmission problem
- Heterogeneous Dielectric Properties in Models for Microelectromechanical Systems
- Qualitative analysis of a curvature equation modelling MEMS with vertical loads
- A free boundary problem in the theory of electrically actuated microdevices
- Erratum to: A variational approach to a stationary free boundary problem modeling MEMS
- On a free boundary model for three-dimensional MEMS with a hinged top plate. II: Parabolic case
- Touchdown is the only finite time singularity in a three-dimensional MEMS model
- On a free boundary model for three-dimensional MEMS with a hinged top plate: stationary case
- Vanishing aspect ratio limit for a fourth-order MEMS model
- Variational solutions to an evolution model for MEMS with heterogeneous dielectric properties
- Some singular equations modeling MEMS
- A fourth-order model for MEMS with clamped boundary conditions
This page was built for publication: A variational approach to a stationary free boundary problem modeling MEMS
Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q2808051)
