A stationary free boundary problem modeling electrostatic MEMS

DOI10.1007/S00205-012-0559-7zbMATH Open1268.78004arXiv1111.1156OpenAlexW3105010165MaRDI QIDQ1944707FDOQ1944707

Christoph Walker, Philippe Laurençot

Publication date: 27 March 2013

Published in: Archive for Rational Mechanics and Analysis (Search for Journal in Brave)

Abstract: A free boundary problem describing small deformations in a membrane based model of electrostatically actuated MEMS is investigated. The existence of stationary solutions is established for small voltage values. A justification of the widely studied narrow-gap model is given by showing that steady state solutions of the free boundary problem converge toward stationary solutions of the narrow-gap model when the aspect ratio of the device tends to zero.

Full work available at URL: https://arxiv.org/abs/1111.1156

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zbMATH Keywords

electrostatic forcemicro-electromechanical systemsfree-boundary solutionnarrow-gap modeloscillating membrane

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Electro- and magnetostatics (78A30) Second-order elliptic systems (35J47) Initial-boundary value problems for second-order hyperbolic equations (35L20) Electromagnetic effects in solid mechanics (74F15) Membranes (74K15)

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Cited In (30)

• Mathematical modelling and analysis of temperature effects in MEMS
• On qualitative properties of solutions to microelectromechanical systems with general permittivity
• No Touchdown at Zero Points of the Permittivity Profile for the MEMS Problem
• A variational approach to a stationary free boundary problem modeling MEMS
• Finite time singularity in a free boundary problem modeling MEMS
• A free boundary problem modeling electrostatic MEMS: I. Linear bending effects
• Finite difference scheme for 2D parabolic problem modelling electrostatic micro-electromechanical systems
• The abstract quasilinear Cauchy problem for a MEMS model with two free boundaries
• Electrostatic field in terms of geometric curvature in membrane MEMS devices
• A free boundary problem in the theory of electrically actuated microdevices
• On the partial differential equations of electrostatic MEMS devices with effects of Casimir force
• On semilinear elliptic equation with negative exponent arising from a closed MEMS model
• Regularized model of post-touchdown configurations in electrostatic MEMS: equilibrium analysis
• The effect of the small-aspect-ratio approximation on canonical electrostatic MEMS models
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• A parabolic free boundary problem modeling electrostatic MEMS
• On the quenching behaviour of a semilinear wave equation modelling MEMS technology
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• On an elliptic-parabolic MEMS model with two free boundaries
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• A new model for electrostatic MEMS with two free boundaries
• Some singular equations modeling MEMS
• A fourth-order model for MEMS with clamped boundary conditions
• A survey on second order free boundary value problems modelling MEMS with general permittivity profile

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