A stationary free boundary problem modeling electrostatic MEMS (Q1944707)

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A stationary free boundary problem modeling electrostatic MEMS
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    A stationary free boundary problem modeling electrostatic MEMS (English)
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    27 March 2013
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    The authors study a free-boundary model for small displacements of an elastic membrane due to deformations actuated by applied electrostatic force as occurs in micro-electromechanical systems. Stationary solutions are found for small voltage values only. Also, the application of the standard narrow-gap model is justified by proving the conditions for a convergence of the solutions for the two models.
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    oscillating membrane
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    electrostatic force
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    micro-electromechanical systems
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    free-boundary solution
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    narrow-gap model
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