A stationary free boundary problem modeling electrostatic MEMS (Q1944707)
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scientific article
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| English | A stationary free boundary problem modeling electrostatic MEMS |
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A stationary free boundary problem modeling electrostatic MEMS (English)
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27 March 2013
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The authors study a free-boundary model for small displacements of an elastic membrane due to deformations actuated by applied electrostatic force as occurs in micro-electromechanical systems. Stationary solutions are found for small voltage values only. Also, the application of the standard narrow-gap model is justified by proving the conditions for a convergence of the solutions for the two models.
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oscillating membrane
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electrostatic force
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micro-electromechanical systems
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free-boundary solution
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narrow-gap model
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0.8961646556854248
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0.8943150639533997
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0.8896909356117249
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0.8838921785354614
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0.8751842379570007
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