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scientific article; zbMATH DE number 1897397
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    scientific article; zbMATH DE number 1897397

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      14 April 2003
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      heat conduction
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      linear elasticity
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      linear thermoelasticity
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      fluid dynamics
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      electromagnetism
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      fluid viscosity
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      electrostatics
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      V-beam actuator
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      thermal anemometer
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      shape memory actuator
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      microfluid
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      This book consists of 357 pages of the main text and 23 pages of supplementary materials, in which there are ten chapters and a list of references. The evaluation of the book on chapter by chapter basis is given as below. The first chapter is devoted to the meaning of MEMS and NEMS, the history of the subject, dimensional analysis and scaling. The second chapter deals with continuum mechanics problems and their relations to MEMS and NEMS. In particular, the authors discuss here heat conduction, pure linear elasticity, linear thermoelasticity, fluid dynamics, electromagnetism and numerical methods for continuum mechanics. Different meanings of smallness, fluid viscosity, heating and cooling, rigidity of structures, electrostatics, fluid interfaces are discussed in chapter 3, together with some applications of electrostatic and magnetostatic actuators. In chapter 4 the authors present thermally driven systems: thermoelastic V-beam actuator, thermal bimorph actuator, thermopneumatic valve, thermal anemometer, metal oxide gas sensor, thermal data storage device, shape memory actuator etc. The modelling of elastic structures like micromirrors, carbon nanotube caps, pressure sensors and similar devices is elaborated in chapter 5. Coupled thermoelastic systems and related devices like thermal bimorph actuators, bi-metallic thermal actuators and thermoelastic V-beam actuators are examined in chapter 6. Chapter 7 is devoted to the modelling of electrostatic elastic systems and their applications like grating light valve, micromirrors, micropumps and similar applications. Modelling of magnetically actuated systems is given in chapter 8. In chapter 9, the authors present microfluid models and their various applications. Finally, limitations of continuum mechanics, Newtonian mechanics and the limit of large numbers with associated devices are discussed in chapter 10. A large number of references are given at the end of the book. The book is well written and may be interesting to researchers working in the area of mathematical modelling.
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