On the partial differential equations of electrostatic MEMS devices. III: Refined touchdown behavior (Q926864)
From MaRDI portal
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | On the partial differential equations of electrostatic MEMS devices. III: Refined touchdown behavior |
scientific article |
Statements
On the partial differential equations of electrostatic MEMS devices. III: Refined touchdown behavior (English)
0 references
21 May 2008
0 references
pull-in voltage
0 references
MEMS
0 references
quenching profiles
0 references
self-similar
0 references
0 references
0 references
