On the partial differential equations of electrostatic MEMS devices. III: Refined touchdown behavior (Q926864)
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scientific article; zbMATH DE number 5277636
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| English | On the partial differential equations of electrostatic MEMS devices. III: Refined touchdown behavior |
scientific article; zbMATH DE number 5277636 |
Statements
On the partial differential equations of electrostatic MEMS devices. III: Refined touchdown behavior (English)
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21 May 2008
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pull-in voltage
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MEMS
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quenching profiles
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self-similar
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0.9601315259933472
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0.8917850255966187
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0.8808389902114868
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0.8712382316589355
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