Mathematical Modeling of Electrostatic MEMS with Tailored Dielectric Properties (Q2783738)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Mathematical Modeling of Electrostatic MEMS with Tailored Dielectric Properties |
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Mathematical Modeling of Electrostatic MEMS with Tailored Dielectric Properties (English)
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17 April 2002
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MEMS
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microelectromechanical system
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exact shooting
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semilinear elliptic problem
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