A numerical study of the pull-in instability in some free boundary models for MEMS
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Publication:2293445
DOI10.1016/J.APM.2016.04.022zbMATH Open1471.78006arXiv1409.1291OpenAlexW2963637166MaRDI QIDQ2293445FDOQ2293445
Authors: Gilberto Flores, Noel F. Smyth 
Publication date: 5 February 2020
Published in: Applied Mathematical Modelling (Search for Journal in Brave)
Abstract: In this work we numerically compute the bifurcation curve of stationary solutions for the free boundary problem for MEMS in one space dimension. It has a single turning point, as in the case of the small aspect ratio limit. We also find a threshold for the existence of global-in-time solutions of the evolution equation given by either a heat or a damped wave equation. This threshold is what we term the dynamical pull-in value: it separates the stable operation regime from the touchdown regime. The numerical calculations show that the dynamical threshold values for the heat equation coincide with the static values. For the damped wave equation the dynamical threshold values are smaller than the static values. This result is in agreement with the observations reported for a mass-spring system studied in the engineering literature. In the case of the damped wave equation, we also show that the aspect ratio of the device is more important than the inertia in the determination of the pull-in value.
Full work available at URL: https://arxiv.org/abs/1409.1291
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Cited In (6)
- Fractal N/MEMS: from pull-in instability to pull-in stability
- On the dynamic pull-in instability in a mass-spring model of electrostatically actuated MEMS devices
- Dynamics of a damped wave equation arising from MEMS
- Singular Points in Electromechanical Systems and Their Determination
- Some singular equations modeling MEMS
- Analysis of dynamic pull-in voltage and response time for a micro-electro-mechanical oscillator made of power-law materials
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