A numerical study of the pull-in instability in some free boundary models for MEMS

DOI10.1016/J.APM.2016.04.022MaRDI QIDQ2293445zbMATH OpenOpenAlexFDO

Authors Gilberto Flores, Noel F. Smyth

Publication date 5 February 2020

Published in Applied Mathematical Modelling (Search for Journal in Brave)

Full work available at URL https://arxiv.org/abs/1409.1291

zbMATH Keywords

damped wave equationfree boundaryMEMSparabolic equationquenching

Mathematics Subject Classification ID

Electromagnetic effects in solid mechanics (74F15) Membranes (74K15) Motion of charged particles (78A35)

Abstract: In this work we numerically compute the bifurcation curve of stationary solutions for the free boundary problem for MEMS in one space dimension. It has a single turning point, as in the case of the small aspect ratio limit. We also find a threshold for the existence of global-in-time solutions of the evolution equation given by either a heat or a damped wave equation. This threshold is what we term the dynamical pull-in value: it separates the stable operation regime from the touchdown regime. The numerical calculations show that the dynamical threshold values for the heat equation coincide with the static values. For the damped wave equation the dynamical threshold values are smaller than the static values. This result is in agreement with the observations reported for a mass-spring system studied in the engineering literature. In the case of the damped wave equation, we also show that the aspect ratio of the device is more important than the inertia in the determination of the pull-in value.

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Cites work

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Cited in

(6)

• Dynamics of a damped wave equation arising from MEMS
• On the dynamic pull-in instability in a mass-spring model of electrostatically actuated MEMS devices
• Fractal N/MEMS: from pull-in instability to pull-in stability
• Some singular equations modeling MEMS
• Singular Points in Electromechanical Systems and Their Determination
• Analysis of dynamic pull-in voltage and response time for a micro-electro-mechanical oscillator made of power-law materials

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