Curvature-dependent electrostatic field as a principle for modelling membrane MEMS device with fringing field

DOI10.1007/s40314-021-01480-zzbMath1476.34051OpenAlexW3137996656MaRDI QIDQ2243984

Luisa Fattorusso, Paolo Di Barba, Mario Versaci

Publication date: 11 November 2021

Published in: Computational and Applied Mathematics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s40314-021-01480-z

zbMATH Keywords

MEMSelectrostatic actuationfringing fieldSchauder-Tychonoff fixed point theoremboundary semi-linear elliptic models

Mathematics Subject Classification ID

Nonlinear ordinary differential equations and systems (34A34)

Related Items (1)

MEMS with fringing field: curvature-dependent electrostatic field and numerical techniques for recovering the membrane profile

Cites Work

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• Periodic solutions to nonlocal MEMS equations
• Curvature dependent electrostatic field in the deformable MEMS device: stability and optimal control
• Reconstructing the membrane detection of a 1D electrostatic-driven MEMS device by the shooting method: convergence analysis and ghost solutions identification
• Electrostatic field in terms of geometric curvature in membrane MEMS devices
• The effect of the small-aspect-ratio approximation on canonical electrostatic MEMS models
• On MEMS equation with fringing field

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