Curvature-dependent electrostatic field as a principle for modelling membrane MEMS device with fringing field (Q2243984)
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English | Curvature-dependent electrostatic field as a principle for modelling membrane MEMS device with fringing field |
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Curvature-dependent electrostatic field as a principle for modelling membrane MEMS device with fringing field (English)
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11 November 2021
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MEMS
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electrostatic actuation
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boundary semi-linear elliptic models
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fringing field
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Schauder-Tychonoff fixed point theorem
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