Curvature dependent electrostatic field in the deformable MEMS device: stability and optimal control (Q827581)
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scientific article; zbMATH DE number 7293735
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| English | Curvature dependent electrostatic field in the deformable MEMS device: stability and optimal control |
scientific article; zbMATH DE number 7293735 |
Statements
Curvature dependent electrostatic field in the deformable MEMS device: stability and optimal control (English)
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13 January 2021
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MEMS device
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electrostatic actuators
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curvature
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0.8321041464805603
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0.8012251257896423
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0.7995756268501282
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0.7907766699790955
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0.7844348549842834
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