Electrostatic field in terms of geometric curvature in membrane MEMS devices (Q2364834)

In this paper, the authors discuss the problem of existence and uniqueness of solutions related to the membrane deformation for electrostatic actuation in the steady state case under a framework of 1D-membrane Micro-Electro-Mechanical-Systems (MEMS) theory. They propose a new model in which the electric field magnitude E is proportional to the curvature of the membrane. For the existence of solution of the differential equation, the Schauder-Tychonoff fixed point theory is employed. Sufficient conditions are obtained for the uniqueness of the solution. In the absence of the explicit solution, a numerical method is developed to study the implicit solution. Some numerical tests are carried out to support the analytical results obtained.