Curvature dependent electrostatic field in the deformable MEMS device: stability and optimal control

DOI10.2478/CAIM-2020-0003MaRDI QIDQ827581zbMATH OpenOpenAlexFDO

Authors P. di Barba, Luisa Fattorusso, Mario Versaci

Publication date 13 January 2021

Published in Communications in Applied and Industrial Mathematics (Search for Journal in Brave)

Copyright license Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International

Full work available at URL https://doi.org/10.2478/caim-2020-0003

zbMATH Keywords

curvatureelectrostatic actuatorsMEMS device

Mathematics Subject Classification ID

Nonlinear boundary value problems for ordinary differential equations (34B15) Topological structure of integral curves, singular points, limit cycles of ordinary differential equations (34C05) Qualitative investigation and simulation of ordinary differential equation models (34C60) Stability of solutions to ordinary differential equations (34D20) Existence theories for optimal control problems involving ordinary differential equations (49J15) Dynamical problems in solid mechanics (74H99)

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Cites work

• Electrostatic field in terms of geometric curvature in membrane MEMS devices
• scientific article; zbMATH DE number 1897397 (Why is no real title available?)
• On a Fourth Order Elliptic Problem with a Singular Nonlinearity
• Periodic solutions to nonlocal MEMS equations
• Reconstructing the membrane detection of a 1D electrostatic-driven MEMS device by the shooting method: convergence analysis and ghost solutions identification

Cited in

(5)

• Reconstructing the membrane detection of a 1D electrostatic-driven MEMS device by the shooting method: convergence analysis and ghost solutions identification
• Curvature-dependent electrostatic field as a principle for modelling membrane MEMS device with fringing field
• MEMS with fringing field: curvature-dependent electrostatic field and numerical techniques for recovering the membrane profile
• Electrostatic field in terms of geometric curvature in membrane MEMS devices
• Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives

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