DYNAMIC ANALYSIS OF MICRO-ELECTRO-MECHANICAL SYSTEMS

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Publication:4355319

DOI<4119::AID-NME42>3.0.CO;2-4 10.1002/(SICI)1097-0207(19961230)39:24<4119::AID-NME42>3.0.CO;2-4zbMath1042.78507OpenAlexW2008637923MaRDI QIDQ4355319

P. S. Ramesh, F. Shi, Subrata Mukherjee

Publication date: 13 November 2002

Full work available at URL: https://doi.org/10.1002/(sici)1097-0207(19961230)39:24<4119::aid-nme42>3.0.co;2-4



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