Charge distribution on narrow MEMS beams of nearly square cross‐section

DOI10.1002/cnm.1021zbMath1151.78373OpenAlexW2024520449MaRDI QIDQ5302260

Hui Chen, Subrata Mukherjee

Publication date: 6 January 2009

Published in: Communications in Numerical Methods in Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/cnm.1021

zbMATH Keywords

boundary element methodmicroelectromechanical systemscharge distributionnarrow beams

Mathematics Subject Classification ID

Boundary element methods applied to problems in optics and electromagnetic theory (78M15) Waves and radiation in optics and electromagnetic theory (78A40)

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Cites Work

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• Modeling of the ground plane in electrostatic BEM analysis of MEMS and NEMS
• BEM modeling of damping forces on MEMS with thin plates
• Electrostatic BEM for MEMS with thin conducting plates and shells
• Multipole BEM for the evaluation of damping forces on MEMS
• Electrostatic BEM for MEMS with thin beams
• Numerical Analysis of Nanotube-Based NEMS Devices—Part I: Electrostatic Charge Distribution on Multiwalled Nanotubes
• DYNAMIC ANALYSIS OF MICRO-ELECTRO-MECHANICAL SYSTEMS
• Charge distribution on thin conducting nanotubes—reduced 3‐D model