Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing (Q1915979): Difference between revisions
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| Property / full work available at URL: https://doi.org/10.1016/0305-0548(95)00062-3 / rank | |||
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| Property / cites work: A logical calculus of the ideas immanent in nervous activity / rank | |||
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| Property / cites work: Q5595902 / rank | |||
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Latest revision as of 12:56, 24 May 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing |
scientific article |
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Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing (English)
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1 July 1996
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modeling and control of processes
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neural network
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