A methodology for fast finite element modeling of electrostatically actuated MEMS (Q3623185): Difference between revisions

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Latest revision as of 12:17, 1 July 2024

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A methodology for fast finite element modeling of electrostatically actuated MEMS
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    A methodology for fast finite element modeling of electrostatically actuated MEMS (English)
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    16 April 2009
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    MEMS
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    modeling
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    FEM
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    electrostatic actuation
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