ANALYSIS OF AN INVERSE PROBLEM ARISING IN PHOTOLITHOGRAPHY (Q2884806): Difference between revisions
From MaRDI portal
Latest revision as of 06:28, 5 July 2024
scientific article
Language | Label | Description | Also known as |
---|---|---|---|
English | ANALYSIS OF AN INVERSE PROBLEM ARISING IN PHOTOLITHOGRAPHY |
scientific article |
Statements
ANALYSIS OF AN INVERSE PROBLEM ARISING IN PHOTOLITHOGRAPHY (English)
0 references
18 May 2012
0 references
photolithograpy
0 references
shape optimization
0 references
sets of finite perimeter
0 references
\(\Gamma \)-convergence
0 references
0 references
0 references
0 references