ANALYSIS OF AN INVERSE PROBLEM ARISING IN PHOTOLITHOGRAPHY

DOI10.1142/S0218202511500266zbMath1237.49059arXiv1002.4059MaRDI QIDQ2884806

Luca Rondi, Fadil Santosa

Publication date: 18 May 2012

Published in: Mathematical Models and Methods in Applied Sciences (Search for Journal in Brave)

Full work available at URL: https://arxiv.org/abs/1002.4059

zbMATH Keywords

sets of finite perimeter; shape optimization; \(\Gamma \)-convergence; photolithograpy

Mathematics Subject Classification ID

49N90: Applications of optimal control and differential games

49J45: Methods involving semicontinuity and convergence; relaxation

49Q10: Optimization of shapes other than minimal surfaces

49N45: Inverse problems in optimal control

Related Items

Maximum flows and minimum cuts in the plane, A Variational Approach to the Inverse Photolithography Problem, Maximum Flows and Minimum Cuts in the Plane

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