ANALYSIS OF AN INVERSE PROBLEM ARISING IN PHOTOLITHOGRAPHY

DOI10.1142/S0218202511500266zbMath1237.49059arXiv1002.4059MaRDI QIDQ2884806

Luca Rondi, Fadil Santosa

Publication date: 18 May 2012

Published in: Mathematical Models and Methods in Applied Sciences (Search for Journal in Brave)

Full work available at URL: https://arxiv.org/abs/1002.4059

zbMATH Keywords

sets of finite perimetershape optimization\(\Gamma \)-convergencephotolithograpy

Mathematics Subject Classification ID

Applications of optimal control and differential games (49N90) Methods involving semicontinuity and convergence; relaxation (49J45) Optimization of shapes other than minimal surfaces (49Q10) Inverse problems in optimal control (49N45)

Related Items (3)

A Variational Approach to the Inverse Photolithography Problem ⋮ Maximum Flows and Minimum Cuts in the Plane ⋮ Maximum flows and minimum cuts in the plane

Cites Work

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• Approximation of functional depending on jumps by elliptic functional via t-convergence
• Optimal stability estimates for the determination of defects by electrostatic measurements

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