ANALYSIS OF AN INVERSE PROBLEM ARISING IN PHOTOLITHOGRAPHY (Q2884806)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | ANALYSIS OF AN INVERSE PROBLEM ARISING IN PHOTOLITHOGRAPHY |
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ANALYSIS OF AN INVERSE PROBLEM ARISING IN PHOTOLITHOGRAPHY (English)
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18 May 2012
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photolithograpy
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shape optimization
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sets of finite perimeter
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\(\Gamma \)-convergence
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