Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS (Q400172): Difference between revisions

@@ Property / Mathematics Subject Classification ID @@
+-05
@@ Property / Mathematics Subject Classification ID: 74-05 / rank @@
+Normal rank
@@ Property / Mathematics Subject Classification ID @@
+M25
@@ Property / Mathematics Subject Classification ID: 74M25 / rank @@
+Normal rank
@@ Property / Mathematics Subject Classification ID @@
+S05
@@ Property / Mathematics Subject Classification ID: 74S05 / rank @@
+Normal rank
@@ Property / zbMATH DE Number @@
+6333113
@@ Property / zbMATH DE Number: 6333113 / rank @@
+Normal rank
@@ Property / zbMATH Keywords @@
+adhesion
@@ Property / zbMATH Keywords: adhesion / rank @@
+Normal rank
@@ Property / zbMATH Keywords @@
+stiction
@@ Property / zbMATH Keywords: stiction / rank @@
+Normal rank
@@ Property / zbMATH Keywords @@
+experiments
@@ Property / zbMATH Keywords: experiments / rank @@
+Normal rank
@@ Property / zbMATH Keywords @@
+finite element method
@@ Property / zbMATH Keywords: finite element method / rank @@
+Normal rank
@@ Property / MaRDI profile type @@
+MaRDI publication profile
@@ Property / MaRDI profile type: MaRDI publication profile / rank @@
+Normal rank
@@ Property / full work available at URL @@
+https://doi.org/10.1007/s11012-013-9767-y
+Normal rank
@@ Property / OpenAlex ID @@
+W1982769279
@@ Property / OpenAlex ID: W1982769279 / rank @@
+Normal rank
@@ Property / cites work @@
+Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems
+Normal rank
@@ links / mardi / name / links / mardi / name @@
+Publication:400172