Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS (Q400172): Difference between revisions
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Property / Mathematics Subject Classification ID: 74-05 / rank | |||
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Property / Mathematics Subject Classification ID: 74M25 / rank | |||
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Property / Mathematics Subject Classification ID: 74S05 / rank | |||
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Property / zbMATH DE Number: 6333113 / rank | |||
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adhesion | |||
Property / zbMATH Keywords: adhesion / rank | |||
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stiction | |||
Property / zbMATH Keywords: stiction / rank | |||
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experiments | |||
Property / zbMATH Keywords: experiments / rank | |||
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finite element method | |||
Property / zbMATH Keywords: finite element method / rank | |||
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Property / MaRDI profile type: MaRDI publication profile / rank | |||
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Property / full work available at URL: https://doi.org/10.1007/s11012-013-9767-y / rank | |||
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Property / OpenAlex ID: W1982769279 / rank | |||
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Property / cites work: Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems / rank | |||
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links / mardi / name | links / mardi / name | ||
Latest revision as of 22:54, 8 July 2024
scientific article
Language | Label | Description | Also known as |
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English | Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS |
scientific article |
Statements
Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS (English)
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21 August 2014
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adhesion
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stiction
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experiments
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finite element method
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