Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS
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Publication:400172
DOI10.1007/s11012-013-9767-yzbMath1293.74006OpenAlexW1982769279MaRDI QIDQ400172
Alberto Corigliano, Biagio De Masi, Leonardo Baldasarre, Luca Magagnin, Attilio Frangi, Raffaele Ardito
Publication date: 21 August 2014
Published in: Meccanica (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s11012-013-9767-y
Finite element methods applied to problems in solid mechanics (74S05) Micromechanics of solids (74M25) Experimental work for problems pertaining to mechanics of deformable solids (74-05)
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