Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps (Q1658038): Difference between revisions

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+Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS
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+Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems
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+Elastic-Plastic Contact Analysis of a Sphere and a Rigid Flat
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+Deformation of silicon - insights from microcompression testing at 25-500\(^\circ \)C
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