Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps (Q1658038): Difference between revisions
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Property / full work available at URL: https://doi.org/10.1016/j.euromechsol.2015.12.004 / rank | |||
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Property / OpenAlex ID: W2208636568 / rank | |||
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Property / cites work: Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS / rank | |||
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Latest revision as of 08:42, 16 July 2024
scientific article
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English | Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps |
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Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps (English)
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14 August 2018
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MEMS sensors
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stiction
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contact model
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