Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps (Q1658038): Difference between revisions
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| Property / cites work: Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS / rank | |||
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| Property / cites work: Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems / rank | |||
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| Property / cites work: Elastic-Plastic Contact Analysis of a Sphere and a Rigid Flat / rank | |||
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| Property / cites work: Deformation of silicon - insights from microcompression testing at 25-500\(^\circ \)C / rank | |||
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Latest revision as of 08:42, 16 July 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps |
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Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps (English)
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14 August 2018
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MEMS sensors
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stiction
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contact model
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