Thermoelastic damping in micromechanical resonators operating as mass sensors (Q1788428): Difference between revisions

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Property / cites work: Thermoelastic coupling effect on a micro-machined beam resonator / rank
 
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Property / cites work: Thermoelastic vibration analysis of MEMS/NEMS plate resonators with voids / rank
 
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Latest revision as of 18:30, 16 July 2024

scientific article
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Thermoelastic damping in micromechanical resonators operating as mass sensors
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    Thermoelastic damping in micromechanical resonators operating as mass sensors (English)
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    8 October 2018
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    thermoelastic damping
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    micro-beam resonator
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    thermal energy approach
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    mass sensitivity
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    minimum detectable mass
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