Thermoelastic vibration analysis of MEMS/NEMS plate resonators with voids (Q2392192)
From MaRDI portal
!
This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use the normal view instead:
scientific article; zbMATH DE number 6193665
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
||
| English | Thermoelastic vibration analysis of MEMS/NEMS plate resonators with voids |
scientific article; zbMATH DE number 6193665 |
Statements
Thermoelastic vibration analysis of MEMS/NEMS plate resonators with voids (English)
0 references
1 August 2013
0 references
microelectronics mechanical systems (MEMS)
0 references
nanoelectronics mechanical systems (NEMS)
0 references
exact solutions for the free vibrations of plates
0 references
0.8780628
0 references
0.8772517
0 references
0.86298156
0 references
0.86041844
0 references
0.8588265
0 references
0.8571671
0 references
0 references
0.85306555
0 references
0.8482406
0 references
