Thermoelastic vibration analysis of MEMS/NEMS plate resonators with voids

DOI10.1007/S00707-011-0557-0MaRDI QIDQ2392192zbMATH OpenOpenAlexFDO

Authors J. N. Sharma, Dhruv Grover

Publication date 1 August 2013

Published in Acta Mechanica (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s00707-011-0557-0

zbMATH Keywords

exact solutions for the free vibrations of platesmicroelectronics mechanical systems (MEMS)nanoelectronics mechanical systems (NEMS)

Mathematics Subject Classification ID

Thermal effects in solid mechanics (74F05) Vibrations in dynamical problems in solid mechanics (74H45) Plates (74K20)

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• Thermal vibration and nonlinear buckling of micro-plates under partial excitation
• Three-dimensional vibration analysis of a thermoelastic cylindrical panel with voids

Cites work

• A generalized dynamical theory of thermoelasticity
• A nonlinear theory of elastic materials with voids
• A theory of thermoelastic materials with voids
• Analysis of the Air-damping Effect on a Micromachined Beam Resonator
• Linear elastic materials with voids
• Natural frequencies of heated annular and circular plates
• Thermoelastic damping in micro-beam resonators
• Three-dimensional vibration analysis of a thermoelastic cylindrical panel with voids

Cited in

(9)

• Thermoelastic damping in micromechanical resonators operating as mass sensors
• Effect of geometry on the performance of MEMS aluminum nitride trampoline resonators in longitudinal resonance
• Generalized thermoelastic diffusion in a nanoscale beam using eigenvalue approach
• Exact solution of thermoelastic damping and frequency shifts in a nano-beam resonator
• Transverse vibrations in micro-scale viscothermoelastic beam resonators
• Damping in microscale modified couple stress thermoelastic circular Kirchhoff plate resonators
• Analysis of thermoelastic damping and modeling of piezothermoelastic plate resonators with voids
• Size-dependent dynamic modeling and vibration analysis of MEMS/NEMS-based nanomechanical beam based on the nonlocal elasticity theory
• A GN model for thermoelastic interaction in a microscale beam subjected to a moving heat source

Describes a project that uses

Uses Software

• Matlab

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