Thermoelastic damping effect analysis in micro flexural resonator of atomic force microscopy (Q1630710)
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scientific article; zbMATH DE number 6991488
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| default for all languages | No label defined |
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| English | Thermoelastic damping effect analysis in micro flexural resonator of atomic force microscopy |
scientific article; zbMATH DE number 6991488 |
Statements
Thermoelastic damping effect analysis in micro flexural resonator of atomic force microscopy (English)
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10 December 2018
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thermoelastic damping (TED)
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atomic force microscopy (AFM)
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quality factor
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0.91143703
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0.90710056
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0.90203476
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0.89991707
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0.89957273
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0.8950175
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0.8939326
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0.8911116
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