Thermoelastic damping in micromechanical resonators operating as mass sensors (Q1788428)
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scientific article; zbMATH DE number 6948634
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| English | Thermoelastic damping in micromechanical resonators operating as mass sensors |
scientific article; zbMATH DE number 6948634 |
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Thermoelastic damping in micromechanical resonators operating as mass sensors (English)
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8 October 2018
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thermoelastic damping
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micro-beam resonator
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thermal energy approach
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mass sensitivity
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minimum detectable mass
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0.8084842562675476
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0.8068503737449646
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0.8067575693130493
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0.7936124205589294
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