Thermoelastic damping in micromechanical resonators operating as mass sensors (Q1788428)
From MaRDI portal
scientific article
Language | Label | Description | Also known as |
---|---|---|---|
English | Thermoelastic damping in micromechanical resonators operating as mass sensors |
scientific article |
Statements
Thermoelastic damping in micromechanical resonators operating as mass sensors (English)
0 references
8 October 2018
0 references
thermoelastic damping
0 references
micro-beam resonator
0 references
thermal energy approach
0 references
mass sensitivity
0 references
minimum detectable mass
0 references