Development of a Framework for Analyzing Process Monitoring Data with Applications to Semiconductor Manufacturing Process (Q3298702): Difference between revisions
From MaRDI portal
Set profile property. |
ReferenceBot (talk | contribs) Changed an Item |
||
| (One intermediate revision by one other user not shown) | |||
| Property / full work available at URL | |||
| Property / full work available at URL: https://doi.org/10.1007/978-3-642-57489-4_42 / rank | |||
Normal rank | |||
| Property / OpenAlex ID | |||
| Property / OpenAlex ID: W192829468 / rank | |||
Normal rank | |||
| Property / cites work | |||
| Property / cites work: Data mining. Concepts and techniques / rank | |||
Normal rank | |||
| Property / cites work | |||
| Property / cites work: Q4220707 / rank | |||
Normal rank | |||
Latest revision as of 03:11, 23 July 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Development of a Framework for Analyzing Process Monitoring Data with Applications to Semiconductor Manufacturing Process |
scientific article |
Statements
Development of a Framework for Analyzing Process Monitoring Data with Applications to Semiconductor Manufacturing Process (English)
0 references
15 July 2020
0 references
semiconductor manufacturing
0 references
data mining
0 references
decision tree
0 references
artificial neural network
0 references
Taguchi parameter design
0 references
