Development of a Framework for Analyzing Process Monitoring Data with Applications to Semiconductor Manufacturing Process (Q3298702): Difference between revisions
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Latest revision as of 02:11, 23 July 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Development of a Framework for Analyzing Process Monitoring Data with Applications to Semiconductor Manufacturing Process |
scientific article |
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Development of a Framework for Analyzing Process Monitoring Data with Applications to Semiconductor Manufacturing Process (English)
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15 July 2020
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semiconductor manufacturing
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data mining
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decision tree
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artificial neural network
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Taguchi parameter design
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