Mechanical behavior of a \(\mu\)m-sized single crystal silicon structure with sharp notches (Q1968714): Difference between revisions
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| Property / author: Jürg Dual / rank | |||
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| Property / cites work: Q5683765 / rank | |||
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| Property / full work available at URL: https://doi.org/10.1016/s0022-5096(98)00112-4 / rank | |||
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Latest revision as of 10:29, 30 July 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Mechanical behavior of a \(\mu\)m-sized single crystal silicon structure with sharp notches |
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Statements
Mechanical behavior of a \(\mu\)m-sized single crystal silicon structure with sharp notches (English)
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21 November 2001
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single crystal silicon structures
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finite element computations
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approximate analytic solutions
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Stroh formalism
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stress concentration
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anisotropic material
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semiconductor material
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mechanical testing
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