Mechanical behavior of a \(\mu\)m-sized single crystal silicon structure with sharp notches
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Publication:1968714
DOI10.1016/S0022-5096(98)00112-4zbMath0973.74510OpenAlexW2071317494MaRDI QIDQ1968714
Publication date: 21 November 2001
Published in: Journal of the Mechanics and Physics of Solids (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/s0022-5096(98)00112-4
stress concentrationmechanical testinganisotropic materialStroh formalismsemiconductor materialapproximate analytic solutionsfinite element computationssingle crystal silicon structures
Crystalline structure (74E15) Finite element methods applied to problems in solid mechanics (74S05) Experimental work for problems pertaining to mechanics of deformable solids (74-05)
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