Mechanical behavior of a \(\mu\)m-sized single crystal silicon structure with sharp notches (Q1968714)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Mechanical behavior of a \(\mu\)m-sized single crystal silicon structure with sharp notches |
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Mechanical behavior of a \(\mu\)m-sized single crystal silicon structure with sharp notches (English)
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21 November 2001
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single crystal silicon structures
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finite element computations
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approximate analytic solutions
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Stroh formalism
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stress concentration
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anisotropic material
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semiconductor material
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mechanical testing
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