Reduced order model compensator control of species transport in a CVD reactor (Q5317787): Difference between revisions

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+Reduced order model compensator control of species transport in a CVD reactor
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+Modeling and control of physical processes using proper orthogonal decomposition
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+https://doi.org/10.1002/1099-1514(200007/08)21:4<143::aid-oca671>3.0.co;2-y
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+Reduced order model compensator control of species transport in a CVD reactor (English)
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